1. Decrease energy consumption^{2, 3, 5}

• upgrade and replace tools with more energy-efficient options;
• implement smart control systems to enable coupling and regulation of facilities and tools; and
• encourage equipment engineers to focus on tool-fleet energy consumption during process recipe optimisation and offer incentives for creating energy-efficient recipes.

2. Optimise energy supply³

• pursue efficiency improvements and switch to alternative fuels (e.g., biogas, green hydrogen) in fab-owned fossil fuel power plants;
• purchase new off-grid energy from renewable power sources;
• install on-site renewable energy power sources; and
• consider access to renewable energy as a factor in deciding the location of new fabs.
  
  

3. Reduce process-gas emissions³

• adjust process parameters, such as temperature and chamber pressure;
• explore the use of alternative chemistries with lower environmental impact;
• implement gas abatement systems, such as point-of-use (POU) systems, point-of-area (POA) systems, and central abatement systems, to address emissions from process gases; and
• capture unutilised process gases and by-products through methods such as membrane separation, cryogenic recovery, adsorption, and desorption for gas recycling.
  
  

4. Implement green product strategy^{3, 5}

• develop processes and partnerships for the responsible handling, recycling, and recovery of semiconductor products at the end of their life cycle.
  
  

5. Advance green design and low-power initiatives³

• invest in research and development to design chips that are more energy efficient during operation; and
• encourage the adoption of power management techniques and technologies that optimise energy usage in electronic system.